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Characterization of semiconductor samples using synchrotron radiation-based near-field infrared microscopy and nano-FTIR spectroscopy
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Authors
Hermann, Peter
;
Hoehl, Arne
;
Ulrich, Georg
;
Fleischmann, Claudia
;
Hermelink, Antje
;
Kästner, Bernd
;
Patoka, Piotr
;
Hornemann, Andrea
;
Beckhoff, Burkhard
;
Rühl, Eckart
;
Ulm, Gerhard
ISSN
1094-4087
Issue
15
Journal
Optics Express
Volume
22
Title
Characterization of semiconductor samples using synchrotron radiation-based near-field infrared microscopy and nano-FTIR spectroscopy
Publication type
Journal article
Embargo date
9999-12-31
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