dc.contributor.author | Heyne, Markus | |
dc.contributor.author | Zhang, Liping | |
dc.contributor.author | Liu, Junjun | |
dc.contributor.author | Ahmad, Iftikhar | |
dc.contributor.author | Toma, Dorel | |
dc.contributor.author | de Marneffe, Jean-Francois | |
dc.contributor.author | De Gendt, Stefan | |
dc.contributor.author | Baklanov, Mikhaïl | |
dc.date.accessioned | 2021-10-22T01:57:01Z | |
dc.date.available | 2021-10-22T01:57:01Z | |
dc.date.issued | 2014 | |
dc.identifier.issn | 1071-1023 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/23930 | |
dc.source | IIOimport | |
dc.title | Quantitative characterization of pore stuffing and unstuffing for postporosity plasma protection of low-k materials | |
dc.type | Journal article | |
dc.contributor.imecauthor | Zhang, Liping | |
dc.contributor.imecauthor | de Marneffe, Jean-Francois | |
dc.contributor.imecauthor | De Gendt, Stefan | |
dc.contributor.orcidimec | De Gendt, Stefan::0000-0003-3775-3578 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 62202 | |
dc.source.journal | Journal of Vacuum Science and Technology B | |
dc.source.issue | 6 | |
dc.source.volume | 32 | |
dc.identifier.url | http://scitation.aip.org/content/avs/journal/jvstb/32/6/10.1116/1.4896759 | |
imec.availability | Published - open access | |