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Quantitative characterization of pore stuffing and unstuffing for postporosity plasma protection of low-k materials

dc.contributor.authorHeyne, Markus
dc.contributor.authorZhang, Liping
dc.contributor.authorLiu, Junjun
dc.contributor.authorAhmad, Iftikhar
dc.contributor.authorToma, Dorel
dc.contributor.authorde Marneffe, Jean-Francois
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorBaklanov, Mikhaïl
dc.date.accessioned2021-10-22T01:57:01Z
dc.date.available2021-10-22T01:57:01Z
dc.date.issued2014
dc.identifier.issn1071-1023
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23930
dc.sourceIIOimport
dc.titleQuantitative characterization of pore stuffing and unstuffing for postporosity plasma protection of low-k materials
dc.typeJournal article
dc.contributor.imecauthorZhang, Liping
dc.contributor.imecauthorde Marneffe, Jean-Francois
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage62202
dc.source.journalJournal of Vacuum Science and Technology B
dc.source.issue6
dc.source.volume32
dc.identifier.urlhttp://scitation.aip.org/content/avs/journal/jvstb/32/6/10.1116/1.4896759
imec.availabilityPublished - open access


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