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ALD applications in advanced CMOS scaling

dc.contributor.authorHeyns, Marc
dc.date.accessioned2021-10-22T01:57:28Z
dc.date.available2021-10-22T01:57:28Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23932
dc.sourceIIOimport
dc.titleALD applications in advanced CMOS scaling
dc.typeProceedings paper
dc.contributor.imecauthorHeyns, Marc
dc.source.peerreviewno
dc.source.beginpagena
dc.source.conferenceBaltic ALD Conference,
dc.source.conferencedate12/05/2014
dc.source.conferencelocationHelsinki Finland
imec.availabilityPublished - imec


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