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New materials for advanced CMOS scaling

dc.contributor.authorHeyns, Marc
dc.date.accessioned2021-10-22T01:57:54Z
dc.date.available2021-10-22T01:57:54Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23934
dc.sourceIIOimport
dc.titleNew materials for advanced CMOS scaling
dc.typeProceedings paper
dc.contributor.imecauthorHeyns, Marc
dc.source.peerreviewno
dc.source.beginpagena
dc.source.conferenceJSPS Meeting
dc.source.conferencedate13/11/2014
dc.source.conferencelocationLeuven Belgium
imec.availabilityPublished - imec


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