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Investigating the effects of subtrate temperature and holder position on the structural and optical behavior of sputtered hexagonal boron nitride films

dc.contributor.authorHoang, Duc Q.
dc.contributor.authorPobedinskas, Paulius
dc.contributor.authorJanssens, Stoffel
dc.contributor.authorD'Haen, Jan
dc.contributor.authorHaenen, Ken
dc.date.accessioned2021-10-22T01:59:31Z
dc.date.available2021-10-22T01:59:31Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23940
dc.sourceIIOimport
dc.titleInvestigating the effects of subtrate temperature and holder position on the structural and optical behavior of sputtered hexagonal boron nitride films
dc.typeOral presentation
dc.contributor.imecauthorPobedinskas, Paulius
dc.contributor.imecauthorD'Haen, Jan
dc.contributor.imecauthorHaenen, Ken
dc.contributor.orcidimecPobedinskas, Paulius::0000-0001-8136-5172
dc.contributor.orcidimecHaenen, Ken::0000-0001-6711-7367
dc.source.peerreviewno
dc.source.conference13th International Conference on Reactive Sputter Deposition
dc.source.conferencedate11/12/2014
dc.source.conferencelocationGent Belgium
imec.availabilityPublished - imec


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