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Growth mechanism of h-BN nanowalls deposited by unbalanced RF sputtering

dc.contributor.authorHoang, Duc-Quang
dc.contributor.authorJanssens, Stoffel
dc.contributor.authorPobedinskas, Paulius
dc.contributor.authorRuttens, Bart
dc.contributor.authorD'Haen, Jan
dc.contributor.authorHaenen, Ken
dc.date.accessioned2021-10-22T01:59:47Z
dc.date.available2021-10-22T01:59:47Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23941
dc.sourceIIOimport
dc.titleGrowth mechanism of h-BN nanowalls deposited by unbalanced RF sputtering
dc.typeOral presentation
dc.contributor.imecauthorPobedinskas, Paulius
dc.contributor.imecauthorRuttens, Bart
dc.contributor.imecauthorD'Haen, Jan
dc.contributor.imecauthorHaenen, Ken
dc.contributor.orcidimecPobedinskas, Paulius::0000-0001-8136-5172
dc.contributor.orcidimecRuttens, Bart::0000-0002-9116-6502
dc.contributor.orcidimecHaenen, Ken::0000-0001-6711-7367
dc.source.peerreviewno
dc.source.conferenceMRS Spring Meeting Symposium MM: Nanotubes and Related Nanostructures
dc.source.conferencedate21/04/2014
dc.source.conferencelocationSan Francisco, CA USA
dc.identifier.urlhttp://mrsspring14.zerista.com/event/member/112160
imec.availabilityPublished - imec


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