Low temperature compatible hafnium oxide based ferroelectrics

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Authors

Hoffmann, Michael; Schenk, Tony; Kulemanov, Igor; Adelmann, Christoph; Popovici, Mihaela Ioana; Schroeder, Uwe; Mikolajick, Thomas

Issue

1

Journal

Ferroelectrics

Volume

480

Title

Low temperature compatible hafnium oxide based ferroelectrics

Publication type

Journal article

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