dc.contributor.author | Hofmann, Michael | |
dc.contributor.author | Schenk, Tony | |
dc.contributor.author | Kulemanov, Ivan | |
dc.contributor.author | Adelmann, Christoph | |
dc.contributor.author | Popovici, Mihaela Ioana | |
dc.contributor.author | Schroeder, Uwe | |
dc.contributor.author | Mikolajick, Thomas | |
dc.date.accessioned | 2021-10-22T02:03:21Z | |
dc.date.available | 2021-10-22T02:03:21Z | |
dc.date.issued | 2014 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/23951 | |
dc.source | IIOimport | |
dc.title | Low temperature compatible hafnium oxide based ferroelectrics | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Adelmann, Christoph | |
dc.contributor.imecauthor | Popovici, Mihaela Ioana | |
dc.contributor.orcidimec | Adelmann, Christoph::0000-0002-4831-3159 | |
dc.source.peerreview | yes | |
dc.source.conference | European Conference on Application of Polar Dielectrics | |
dc.source.conferencedate | 7/07/2014 | |
dc.source.conferencelocation | Vilnius Lithuania | |
imec.availability | Published - imec | |