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Glyoxylic acid as reducing agent for electroless copper deposition on cobalt liner

dc.contributor.authorInoue, Fumihiro
dc.contributor.authorPhilipsen, Harold
dc.contributor.authorvan der Veen, Marleen
dc.contributor.authorVan Huylenbroeck, Stefaan
dc.contributor.authorArmini, Silvia
dc.contributor.authorStruyf, Herbert
dc.contributor.authorTanaka, Tetsu
dc.date.accessioned2021-10-22T02:12:49Z
dc.date.available2021-10-22T02:12:49Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23982
dc.sourceIIOimport
dc.titleGlyoxylic acid as reducing agent for electroless copper deposition on cobalt liner
dc.typeMeeting abstract
dc.contributor.imecauthorInoue, Fumihiro
dc.contributor.imecauthorPhilipsen, Harold
dc.contributor.imecauthorvan der Veen, Marleen
dc.contributor.imecauthorVan Huylenbroeck, Stefaan
dc.contributor.imecauthorArmini, Silvia
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.orcidimecPhilipsen, Harold::0000-0002-5029-1104
dc.contributor.orcidimecvan der Veen, Marleen::0000-0002-9402-8922
dc.contributor.orcidimecVan Huylenbroeck, Stefaan::0000-0001-9978-3575
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.source.peerreviewno
dc.source.beginpage1703
dc.source.conference226th Meeting Fall of the Electrochemical Society
dc.source.conferencedate5/10/2014
dc.source.conferencelocationCancun Mexico
dc.identifier.urlhttp://ma.ecsdl.org/content/MA2014-02/33/1703.short
imec.availabilityPublished - imec


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