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Development of glyoxylic acid based electroless copper deposition on ruthenium

dc.contributor.authorInoue, Fumihiro
dc.contributor.authorPhilipsen, Harold
dc.contributor.authorvan der Veen, Marleen
dc.contributor.authorVan Huylenbroeck, Stefaan
dc.contributor.authorArmini, Silvia
dc.contributor.authorStruyf, Herbert
dc.contributor.authorTanaka, Tetsu
dc.contributor.authorShingubara, Shoso
dc.date.accessioned2021-10-22T02:13:26Z
dc.date.available2021-10-22T02:13:26Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23984
dc.sourceIIOimport
dc.titleDevelopment of glyoxylic acid based electroless copper deposition on ruthenium
dc.typeMeeting abstract
dc.contributor.imecauthorInoue, Fumihiro
dc.contributor.imecauthorPhilipsen, Harold
dc.contributor.imecauthorvan der Veen, Marleen
dc.contributor.imecauthorVan Huylenbroeck, Stefaan
dc.contributor.imecauthorArmini, Silvia
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.orcidimecPhilipsen, Harold::0000-0002-5029-1104
dc.contributor.orcidimecvan der Veen, Marleen::0000-0002-9402-8922
dc.contributor.orcidimecVan Huylenbroeck, Stefaan::0000-0001-9978-3575
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.source.peerreviewno
dc.source.beginpage1701
dc.source.conference226th Fall Meeting of the Electrochemical Society
dc.source.conferencedate5/10/2014
dc.source.conferencelocationCancun Mexico
dc.identifier.urlhttp://ma.ecsdl.org/content/MA2014-02/33/1701.short
imec.availabilityPublished - imec


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