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Inspection of directed self assembly defects

dc.contributor.authorIto, Chikashi
dc.contributor.authorDurant, Stephane
dc.contributor.authorLange, Steve
dc.contributor.authorHarukawa, Ryota
dc.contributor.authorMiyagi, Takemasa
dc.contributor.authorNagaswami, Venkat
dc.contributor.authorRincon Delgadillo, Paulina
dc.contributor.authorGronheid, Roel
dc.contributor.authorNealey, Paul
dc.date.accessioned2021-10-22T02:15:21Z
dc.date.available2021-10-22T02:15:21Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23990
dc.sourceIIOimport
dc.titleInspection of directed self assembly defects
dc.typeProceedings paper
dc.contributor.imecauthorRincon Delgadillo, Paulina
dc.contributor.imecauthorGronheid, Roel
dc.source.peerreviewyes
dc.source.beginpage90492D
dc.source.conferenceAlternative Lithographic Technologies VI
dc.source.conferencedate24/02/2014
dc.source.conferencelocationSan Jose, CA USA
dc.identifier.urlhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1857188
imec.availabilityPublished - imec
imec.internalnotesProceedings of SPIE; Vol. 9049


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