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Ultra-thin nanocrystalline diamond membranes as pressure sensors for harsh environments

dc.contributor.authorJanssens, Stoffel
dc.contributor.authorDrijkoningen, Sien
dc.contributor.authorHaenen, Ken
dc.date.accessioned2021-10-22T02:19:23Z
dc.date.available2021-10-22T02:19:23Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24004
dc.sourceIIOimport
dc.titleUltra-thin nanocrystalline diamond membranes as pressure sensors for harsh environments
dc.typeOral presentation
dc.contributor.imecauthorHaenen, Ken
dc.contributor.orcidimecHaenen, Ken::0000-0001-6711-7367
dc.source.peerreviewno
dc.source.conference25th International Conference on Diamond and Carbon Materials
dc.source.conferencedate7/09/2014
dc.source.conferencelocationMadrid Spanje
imec.availabilityPublished - imec


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