CVD Mn-based barrier for advanced copper interconnect technology: integration study
dc.contributor.author | Jourdan, Nicolas | |
dc.date.accessioned | 2021-10-22T02:24:21Z | |
dc.date.available | 2021-10-22T02:24:21Z | |
dc.date.issued | 2014 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/24019 | |
dc.source | IIOimport | |
dc.title | CVD Mn-based barrier for advanced copper interconnect technology: integration study | |
dc.type | Meeting abstract | |
dc.contributor.imecauthor | Jourdan, Nicolas | |
dc.source.peerreview | no | |
dc.source.beginpage | EM-Tu5 | |
dc.source.conference | AVS 61st International Symposium & Exhibition | |
dc.source.conferencedate | 9/11/2014 | |
dc.source.conferencelocation | Baltimore, MD USA | |
dc.identifier.url | http://www2.avs.org/symposium2014/Papers/Paper_EM-TuM5.html | |
imec.availability | Published - imec |
Files in this item
Files | Size | Format | View |
---|---|---|---|
There are no files associated with this item. |