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SrTiO3 for sub-20 nm DRAM technology nodes – characterization and modeling

dc.contributor.authorKaczer, Ben
dc.contributor.authorLarcher, Luca
dc.contributor.authorVandelli, Luca
dc.contributor.authorResinger, Hans
dc.contributor.authorPopovici, Mihaela Ioana
dc.contributor.authorClima, Sergiu
dc.contributor.authorJi, Zhigang
dc.contributor.authorJoshi, Saumya
dc.contributor.authorSwerts, Johan
dc.contributor.authorRedolfi, Augusto
dc.contributor.authorAfanasiev, Valeri
dc.contributor.authorJurczak, Gosia
dc.date.accessioned2021-10-22T02:25:22Z
dc.date.available2021-10-22T02:25:22Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24022
dc.sourceIIOimport
dc.titleSrTiO3 for sub-20 nm DRAM technology nodes – characterization and modeling
dc.typeProceedings paper
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorPopovici, Mihaela Ioana
dc.contributor.imecauthorClima, Sergiu
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorRedolfi, Augusto
dc.contributor.imecauthorAfanasiev, Valeri
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.contributor.orcidimecClima, Sergiu::0000-0002-4044-9975
dc.contributor.orcidimecPopovici, Mihaela Ioana::0000-0002-9838-1088
dc.contributor.orcidimecAfanasiev, Valeri::0000-0001-5018-4539
dc.source.peerreviewyes
dc.source.beginpagena
dc.source.conferenceIEEE Semiconductor Interfaces Specialist Conference - SISC
dc.source.conferencedate10/12/2014
dc.source.conferencelocationSan Diego, CA USA
imec.availabilityPublished - imec


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