Structural and dielectric properties of parylene-VT4 thin films

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Authors
Kahouli, A.; Sylvestre, A.; Laithier, J.-F.; Lutsen, Laurence; Pairis, S.; André, E.; Garden, J.-L.
ISSN
0254-0584
Journal
Materials Chemistry and Physics
Volume
143
Title
Structural and dielectric properties of parylene-VT4 thin films
Publication type
Journal article
Embargo date
9999-12-31
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