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Structural and dielectric properties of parylene-VT4 thin films

dc.contributor.authorKahouli, A.
dc.contributor.authorSylvestre, A.
dc.contributor.authorLaithier, J.-F.
dc.contributor.authorLutsen, Laurence
dc.contributor.authorPairis, S.
dc.contributor.authorAndré, E.
dc.contributor.authorGarden, J.-L.
dc.date.accessioned2021-10-22T02:26:19Z
dc.date.available2021-10-22T02:26:19Z
dc.date.issued2014
dc.identifier.issn0254-0584
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24025
dc.sourceIIOimport
dc.titleStructural and dielectric properties of parylene-VT4 thin films
dc.typeJournal article
dc.contributor.imecauthorLutsen, Laurence
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage908
dc.source.endpage914
dc.source.journalMaterials Chemistry and Physics
dc.source.volume143
dc.identifier.urlhttp://www.sciencedirect.com/science/article/pii/S0254058413006469
imec.availabilityPublished - open access


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