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AlN/AlGaN/GaN wafer optimization on silicon (111): bow and crystal quality control for Si-CMOS fabs

dc.contributor.authorKandaswamy, Prem Kumar
dc.contributor.authorLiang, Hu
dc.contributor.authorZhao, Ming
dc.contributor.authorSaripalli, Yoga
dc.contributor.authorPorter Carlson, Eric
dc.contributor.authorThapa, Sarad Bahadur
dc.contributor.authorVan Hove, Marleen
dc.contributor.authorRichard, Olivier
dc.contributor.authorDe Vos, Brecht
dc.contributor.authorVancoille, Eric
dc.contributor.authorDutta, Barundeb
dc.date.accessioned2021-10-22T02:27:33Z
dc.date.available2021-10-22T02:27:33Z
dc.date.issued2014
dc.identifier.issn1610-1634
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24029
dc.sourceIIOimport
dc.titleAlN/AlGaN/GaN wafer optimization on silicon (111): bow and crystal quality control for Si-CMOS fabs
dc.typeJournal article
dc.contributor.imecauthorLiang, Hu
dc.contributor.imecauthorZhao, Ming
dc.contributor.imecauthorThapa, Sarad Bahadur
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorDe Vos, Brecht
dc.contributor.imecauthorVancoille, Eric
dc.contributor.imecauthorDutta, Barundeb
dc.contributor.orcidimecZhao, Ming::0000-0002-0856-851X
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.source.peerreviewyes
dc.source.beginpage450
dc.source.endpage453
dc.source.journalPhysica Status Solidi C
dc.source.issue3_4
dc.source.volume11
dc.identifier.urlhttp://onlinelibrary.wiley.com/doi/10.1002/pssc.201300524/abstract
imec.availabilityPublished - imec


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