dc.contributor.author | Kandaswamy, Prem Kumar | |
dc.contributor.author | Liang, Hu | |
dc.contributor.author | Zhao, Ming | |
dc.contributor.author | Saripalli, Yoga | |
dc.contributor.author | Porter Carlson, Eric | |
dc.contributor.author | Thapa, Sarad Bahadur | |
dc.contributor.author | Van Hove, Marleen | |
dc.contributor.author | Richard, Olivier | |
dc.contributor.author | De Vos, Brecht | |
dc.contributor.author | Vancoille, Eric | |
dc.contributor.author | Dutta, Barundeb | |
dc.date.accessioned | 2021-10-22T02:27:33Z | |
dc.date.available | 2021-10-22T02:27:33Z | |
dc.date.issued | 2014 | |
dc.identifier.issn | 1610-1634 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/24029 | |
dc.source | IIOimport | |
dc.title | AlN/AlGaN/GaN wafer optimization on silicon (111): bow and crystal quality control for Si-CMOS fabs | |
dc.type | Journal article | |
dc.contributor.imecauthor | Liang, Hu | |
dc.contributor.imecauthor | Zhao, Ming | |
dc.contributor.imecauthor | Thapa, Sarad Bahadur | |
dc.contributor.imecauthor | Richard, Olivier | |
dc.contributor.imecauthor | De Vos, Brecht | |
dc.contributor.imecauthor | Vancoille, Eric | |
dc.contributor.imecauthor | Dutta, Barundeb | |
dc.contributor.orcidimec | Zhao, Ming::0000-0002-0856-851X | |
dc.contributor.orcidimec | Richard, Olivier::0000-0002-3994-8021 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 450 | |
dc.source.endpage | 453 | |
dc.source.journal | Physica Status Solidi C | |
dc.source.issue | 3_4 | |
dc.source.volume | 11 | |
dc.identifier.url | http://onlinelibrary.wiley.com/doi/10.1002/pssc.201300524/abstract | |
imec.availability | Published - imec | |