Publication:
AlN/AlGaN/GaN wafer optimization on silicon (111): bow and crystal quality control for Si-CMOS fabs
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2029 since deposited on 2021-10-22
1last month
Acq. date: 2026-01-11
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2029 since deposited on 2021-10-22
1last month
Acq. date: 2026-01-11
Citations