Publication:
AlN/AlGaN/GaN wafer optimization on silicon (111): bow and crystal quality control for Si-CMOS fabs
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2028 since deposited on 2021-10-22
2last month
1last week
Acq. date: 2025-12-07
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Views
2028 since deposited on 2021-10-22
2last month
1last week
Acq. date: 2025-12-07
Citations