Authors

Kandaswamy, Prem Kumar; Liang, Hu; Zhao, Ming; Saripalli, Yoga; Porter Carlson, Eric; Thapa, Sarad Bahadur; Van Hove, Marleen; Richard, Olivier; De Vos, Brecht; Vancoille, Eric; Dutta, Barundeb

ISSN

1610-1634

Issue

3_4

Journal

Physica Status Solidi C

Volume

11

Title

AlN/AlGaN/GaN wafer optimization on silicon (111): bow and crystal quality control for Si-CMOS fabs

Publication type

Journal article