Publication:

AlN/AlGaN/GaN wafer optimization on silicon (111): bow and crystal quality control for Si-CMOS fabs

Date

2014
Journal article
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dc.contributor.authorKandaswamy, Prem Kumar
dc.contributor.authorLiang, Hu
dc.contributor.authorZhao, Ming
dc.contributor.authorSaripalli, Yoga
dc.contributor.authorPorter Carlson, Eric
dc.contributor.authorThapa, Sarad Bahadur
dc.contributor.authorVan Hove, Marleen
dc.contributor.authorRichard, Olivier
dc.contributor.authorDe Vos, Brecht
dc.contributor.authorVancoille, Eric
dc.contributor.authorDutta, Barundeb
dc.contributor.imecauthorLiang, Hu
dc.contributor.imecauthorZhao, Ming
dc.contributor.imecauthorThapa, Sarad Bahadur
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorDe Vos, Brecht
dc.contributor.imecauthorVancoille, Eric
dc.contributor.imecauthorDutta, Barundeb
dc.contributor.orcidimecZhao, Ming::0000-0002-0856-851X
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.date.accessioned2021-10-22T02:27:33Z
dc.date.available2021-10-22T02:27:33Z
dc.date.issued2014
dc.identifier.issn1610-1634
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24029
dc.identifier.urlhttp://onlinelibrary.wiley.com/doi/10.1002/pssc.201300524/abstract
dc.source.beginpage450
dc.source.endpage453
dc.source.issue3_4
dc.source.journalPhysica Status Solidi C
dc.source.volume11
dc.title

AlN/AlGaN/GaN wafer optimization on silicon (111): bow and crystal quality control for Si-CMOS fabs

dc.typeJournal article
dspace.entity.typePublication
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