Publication:

AlN/AlGaN/GaN wafer optimization on silicon (111): bow and crystal quality control for Si-CMOS fabs

Date

2014
Journal article
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Author(s)

Kandaswamy, Prem Kumar
;
Liang, Hu  
;
Zhao, Ming  
;
Saripalli, Yoga
;
Porter Carlson, Eric
;
Thapa, Sarad Bahadur  
;
Van Hove, Marleen
;
Richard, Olivier  
;
De Vos, Brecht  
;
Vancoille, Eric  
;
Dutta, Barundeb  

Journal

Physica Status Solidi C

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2032 since deposited on 2021-10-22
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Acq. date: 2026-04-28

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