Publication:
AlN/AlGaN/GaN wafer optimization on silicon (111): bow and crystal quality control for Si-CMOS fabs
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2033 since deposited on 2021-10-22
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Acq. date: 2026-07-25
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Statistics
Views
2033 since deposited on 2021-10-22
1last month
1last week
Acq. date: 2026-07-25
Citations