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dc.contributor.authorKarim, Marwa
dc.contributor.authorMartini, Roberto
dc.contributor.authorSivaramakrishnan Radhakrishnan, Hariharsudan
dc.contributor.authorDepauw, Valerie
dc.contributor.authorVan Nieuwenhuysen, Kris
dc.contributor.authorRamadan, Wegdan
dc.contributor.authorGordon, Ivan
dc.contributor.authorPoortmans, Jef
dc.date.accessioned2021-10-22T02:29:21Z
dc.date.available2021-10-22T02:29:21Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24034
dc.sourceIIOimport
dc.titleTuning of strain and surface roughness of porous silicon layers for higher-quality seeds for epitaxial growth
dc.typeProceedings paper
dc.contributor.imecauthorSivaramakrishnan Radhakrishnan, Hariharsudan
dc.contributor.imecauthorDepauw, Valerie
dc.contributor.imecauthorGordon, Ivan
dc.contributor.imecauthorPoortmans, Jef
dc.contributor.orcidimecSivaramakrishnan Radhakrishnan, Hariharsudan::0000-0003-1963-273X
dc.contributor.orcidimecDepauw, Valerie::0000-0003-2045-9698
dc.contributor.orcidimecGordon, Ivan::0000-0002-0713-8403
dc.contributor.orcidimecPoortmans, Jef::0000-0003-2077-2545
dc.source.peerreviewyes
dc.source.beginpage56
dc.source.endpage57
dc.source.conferencePorous Semiconductors Science and Technology - PSST
dc.source.conferencedate9/03/2014
dc.source.conferencelocationAlicante Spain
dc.identifier.urlhttp://the-psst.com/psst2014/ISO%20B5%20libro%20PSST%202014-%20corrected%2020%20feb%202014.pdf
imec.availabilityPublished - imec


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