Change of diamond film structure and morphology with N2 addition in MW PECVD apparatus with linear antenna delivery system

Krecmarova, Marie Jakl; Petrak, Vaclav; Taylor, Andrew; Kamatchi Jothiramalingam, Sankaran; Lin, I-Nan; Jäger, Ale; Gärtnerova, Viera; Fekete, Ladislav; Drahokoupil, Jan; Laufek, Frantisek; Vacik, Jiri; Hubik, Pavel; Mortet, Vincent; Nesladek, Milos

doi:10.1002/pssa.201431255

Publication:

Change of diamond film structure and morphology with N2 addition in MW PECVD apparatus with linear antenna delivery system

Date

2014

Journal article

https://doi.org/10.1002/pssa.201431255

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Krecmarova, Marie Jakl

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Petrak, Vaclav

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Taylor, Andrew

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Kamatchi Jothiramalingam, Sankaran

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Journal

Physica Status Solidi A

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1 since deposited on 2021-10-22

Acq. date: 2026-01-11

2014 since deposited on 2021-10-22

Acq. date: 2026-01-11

Change of diamond film structure and morphology with N2 addition in MW PECVD apparatus with linear antenna delivery system

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