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Change of diamond film structure and morphology with N2 addition in MW PECVD apparatus with linear antenna delivery system
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Authors
Krecmarova, Marie Jakl
;
Petrak, Vaclav
;
Taylor, Andrew
;
Kamatchi Jothiramalingam, Sankaran
;
Lin, I-Nan
;
Jäger, Ale
;
Gärtnerova, Viera
;
Fekete, Ladislav
;
Drahokoupil, Jan
;
Laufek, Frantisek
;
Vacik, Jiri
;
Hubik, Pavel
;
Mortet, Vincent
;
Nesladek, Milos
DOI
10.1002/pssa.201431255
ISSN
1862-6300
Issue
10
Journal
Physica Status Solidi A
Volume
211
Title
Change of diamond film structure and morphology with N2 addition in MW PECVD apparatus with linear antenna delivery system
Publication type
Journal article
Embargo date
9999-12-31
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