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Change of diamond film structure and morphology with N2 addition in MW PECVD apparatus with linear antenna delivery system

dc.contributor.authorKrecmarova, Marie Jakl
dc.contributor.authorPetrak, Vaclav
dc.contributor.authorTaylor, Andrew
dc.contributor.authorKamatchi Jothiramalingam, Sankaran
dc.contributor.authorLin, I-Nan
dc.contributor.authorJäger, Aleš
dc.contributor.authorGärtnerova, Viera
dc.contributor.authorFekete, Ladislav
dc.contributor.authorDrahokoupil, Jan
dc.contributor.authorLaufek, Frantisek
dc.contributor.authorVacik, Jiri
dc.contributor.authorHubik, Pavel
dc.contributor.authorMortet, Vincent
dc.contributor.authorNesladek, Milos
dc.date.accessioned2021-10-22T02:39:06Z
dc.date.available2021-10-22T02:39:06Z
dc.date.issued2014
dc.identifier.issn1862-6300
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24064
dc.sourceIIOimport
dc.titleChange of diamond film structure and morphology with N2 addition in MW PECVD apparatus with linear antenna delivery system
dc.typeJournal article
dc.contributor.imecauthorNesladek, Milos
dc.date.embargo9999-12-31
dc.identifier.doi10.1002/pssa.201431255
dc.source.peerreviewyes
dc.source.beginpage2296
dc.source.endpage2301
dc.source.journalPhysica Status Solidi A
dc.source.issue10
dc.source.volume211
dc.identifier.urlhttp://onlinelibrary.wiley.com/doi/10.1002/pssa.201431255/abstract
imec.availabilityPublished - open access


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