Improvement of cohesion strength in ULK OSG materials by pore structure adjustment

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Authors
Krishtab, Mikhail; Vanstreels, Kris; Savage, T.; Matsunaga, K.; De Gendt, Stefan; Baklanov, Mikhaïl
Conference
23rd Materials For Advanced Metallization Conference - MAM
Title
Improvement of cohesion strength in ULK OSG materials by pore structure adjustment
Publication type
Meeting abstract
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