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Effect of downstream plasma treatment on dissolution of fluorocarbon polymer in organic solvents

dc.contributor.authorLe, Quoc Toan
dc.contributor.authorKesters, Els
dc.contributor.authorDevonport, Joshua
dc.contributor.authorHolsteyns, Frank
dc.contributor.authorDe Gendt, Stefan
dc.date.accessioned2021-10-22T02:53:04Z
dc.date.available2021-10-22T02:53:04Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24107
dc.sourceIIOimport
dc.titleEffect of downstream plasma treatment on dissolution of fluorocarbon polymer in organic solvents
dc.typeProceedings paper
dc.contributor.imecauthorLe, Quoc Toan
dc.contributor.imecauthorKesters, Els
dc.contributor.imecauthorHolsteyns, Frank
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecLe, Quoc Toan::0000-0002-0206-6279
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.source.peerreviewyes
dc.source.beginpage197
dc.source.endpage200
dc.source.conferenceUltra Clean Processing of Semiconductor Surfaces - UCPSS
dc.source.conferencedate21/09/2014
dc.source.conferencelocationBrussels Belgium
dc.identifier.urlhttp://www.scientific.net/SSP.219.197
imec.availabilityPublished - imec
imec.internalnotesSolid State Phenomena; Vol. 219


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