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Hydrogen outgassing induced liner barrier reliability degradation in through silicon via's

dc.contributor.authorLi, Yunlong
dc.contributor.authorOba, Yoshiyuki
dc.contributor.authorWu, Chen
dc.contributor.authorVan Huylenbroeck, Stefaan
dc.contributor.authorVan Besien, Els
dc.contributor.authorVereecke, Guy
dc.contributor.authorStucchi, Michele
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorBeyer, Gerald
dc.contributor.authorBeyne, Eric
dc.contributor.authorCroes, Kristof
dc.date.accessioned2021-10-22T03:03:35Z
dc.date.available2021-10-22T03:03:35Z
dc.date.issued2014
dc.identifier.issn0003-6951
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24136
dc.sourceIIOimport
dc.titleHydrogen outgassing induced liner barrier reliability degradation in through silicon via's
dc.typeJournal article
dc.contributor.imecauthorLi, Yunlong
dc.contributor.imecauthorWu, Chen
dc.contributor.imecauthorVan Huylenbroeck, Stefaan
dc.contributor.imecauthorVan Besien, Els
dc.contributor.imecauthorVereecke, Guy
dc.contributor.imecauthorStucchi, Michele
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.imecauthorBeyne, Eric
dc.contributor.imecauthorCroes, Kristof
dc.contributor.orcidimecLi, Yunlong::0000-0003-4791-4013
dc.contributor.orcidimecWu, Chen::0000-0002-4636-8842
dc.contributor.orcidimecVan Huylenbroeck, Stefaan::0000-0001-9978-3575
dc.contributor.orcidimecVan Besien, Els::0000-0002-5174-2229
dc.contributor.orcidimecVereecke, Guy::0000-0001-9058-9338
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.contributor.orcidimecBeyne, Eric::0000-0002-3096-050X
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.source.peerreviewyes
dc.source.beginpage142906
dc.source.journalApplied Physics Letters
dc.source.issue14
dc.source.volume104
dc.identifier.urlhttp://dx.doi.org/10.1063/1.4871104
imec.availabilityPublished - imec


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