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Metal gate work function tuning by Al incorporation in TiN

dc.contributor.authorLima, Lucas Petersen Barbosa
dc.contributor.authorDekkers, Harold
dc.contributor.authorLisoni, Judit
dc.contributor.authorDiniz, Jose
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorDe Gendt, Stefan
dc.date.accessioned2021-10-22T03:07:18Z
dc.date.available2021-10-22T03:07:18Z
dc.date.issued2014
dc.identifier.issn0021-8979
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24143
dc.sourceIIOimport
dc.titleMetal gate work function tuning by Al incorporation in TiN
dc.typeJournal article
dc.contributor.imecauthorDekkers, Harold
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecDekkers, Harold::0000-0003-4778-5709
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage74504
dc.source.journalJournal of Applied Physics
dc.source.issue7
dc.source.volume115
dc.identifier.urlhttps://doi.org/10.1063/1.4866323
imec.availabilityPublished - open access


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