Metal gate work function tuning by Al incorporation in TiN

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Authors

Lima, Lucas Petersen Barbosa; Dekkers, Harold; Lisoni, Judit; Diniz, Jose; Van Elshocht, Sven; De Gendt, Stefan

ISSN

0021-8979

Issue

7

Journal

Journal of Applied Physics

Volume

115

Title

Metal gate work function tuning by Al incorporation in TiN

Publication type

Journal article

Embargo date

9999-12-31

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