Publication:
Metal gate work function tuning by Al incorporation in TiN
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1 since deposited on 2021-10-22
Acq. date: 2025-10-29
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1963 since deposited on 2021-10-22
Acq. date: 2025-10-29
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Downloads
1 since deposited on 2021-10-22
Acq. date: 2025-10-29
Views
1963 since deposited on 2021-10-22
Acq. date: 2025-10-29
Citations