Publication:
Metal gate work function tuning by Al incorporation in TiN
Date
Loading...
Files
Journal
Abstract
Description
Statistics
Downloads
1 since deposited on 2021-10-22
Acq. date: 2026-04-26
Views
1992 since deposited on 2021-10-22
6last month
1last week
Acq. date: 2026-04-26
Citations
Statistics
Downloads
1 since deposited on 2021-10-22
Acq. date: 2026-04-26
Views
1992 since deposited on 2021-10-22
6last month
1last week
Acq. date: 2026-04-26
Citations