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Metal gate work function tuning by Al incorporation in TiN
Publication:
Metal gate work function tuning by Al incorporation in TiN
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Date
2014
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Lima, Lucas Petersen Barbosa
;
Dekkers, Harold
;
Lisoni, Judit
;
Diniz, Jose
;
Van Elshocht, Sven
;
De Gendt, Stefan
Journal
Journal of Applied Physics
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1
since deposited on 2021-10-22
Acq. date: 2026-02-24
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1980
since deposited on 2021-10-22
3
last month
Acq. date: 2026-02-24
Citations