Authors

Lisoni, Judit; Breuil, Laurent; Blomme, Pieter; De Stefano, Francesca; Afanasiev, Valeri; Van den Bosch, Geert; Van Houdt, Jan

Conference

Dielectrics for Nanosystems 6: Materials Science, Processing, Reliability, and Manufacturing

Title

High-k dielectrics and high work function metals for hybrid floating gate NAND flash applications

Publication type

Proceedings paper

Embargo date

9999-12-31