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Grown-in defects in epitaxial layers

dc.contributor.authorLoo, Roger
dc.date.accessioned2021-10-22T03:14:28Z
dc.date.available2021-10-22T03:14:28Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24164
dc.sourceIIOimport
dc.titleGrown-in defects in epitaxial layers
dc.typeOral presentation
dc.contributor.imecauthorLoo, Roger
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.source.peerreviewno
dc.source.conferenceDoctoral School on Defects in Semiconductors: Origin, Characterization, Impact on Devices and Yield
dc.source.conferencedate1/09/2014
dc.source.conferencelocationGent Belgium
imec.availabilityPublished - imec


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