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PMMA removal in diblock copolymer P(S-b-MMA) self-assembly process

dc.contributor.authorLoucif Seiad, Mohamed
dc.contributor.authorGronheid, Roel
dc.contributor.authorSingh, Arjun
dc.contributor.authorMKuppuswamy, Vijaya Kumar
dc.contributor.authorCao, Yi
dc.contributor.authorFerhat, Marhoun
dc.date.accessioned2021-10-22T03:16:25Z
dc.date.available2021-10-22T03:16:25Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24169
dc.sourceIIOimport
dc.titlePMMA removal in diblock copolymer P(S-b-MMA) self-assembly process
dc.typeMeeting abstract
dc.contributor.imecauthorGronheid, Roel
dc.contributor.imecauthorSingh, Arjun
dc.source.peerreviewno
dc.source.beginpagena
dc.source.conferencePlasma Etch and Strip Processes for Micro and Nano- Technologies - PESM
dc.source.conferencedate12/06/2014
dc.source.conferencelocationGrenoble France
imec.availabilityPublished - imec


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