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Etch development for E-mode GaN power HEMT fabrication
Publication:
Etch development for E-mode GaN power HEMT fabrication
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Date
2014
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Mannaert, Geert
;
Posthuma, Niels
;
De Jaeger, Brice
;
Van Hove, Marleen
;
Xu, Kaidong
;
Decoutere, Stefaan
;
Paraschiv, Vasile
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1828
since deposited on 2021-10-22
Acq. date: 2025-12-18
Citations
Metrics
Views
1828
since deposited on 2021-10-22
Acq. date: 2025-12-18
Citations