Etch development for E-mode GaN power HEMT fabrication

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Authors
Mannaert, Geert; Posthuma, Niels; De Jaeger, Brice; Van Hove, Marleen; Xu, Kaidong; Decoutere, Stefaan; Paraschiv, Vasile
Conference
Plasma Etch and Strip in Microtechnology - PESM
Title
Etch development for E-mode GaN power HEMT fabrication
Publication type
Meeting abstract
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