Publication:

Etch development for E-mode GaN power HEMT fabrication

Date

2014

Meeting abstract

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Author(s)

Mannaert, Geert

;

Posthuma, Niels

;

De Jaeger, Brice

;

Van Hove, Marleen

;

;

Decoutere, Stefaan

;

Paraschiv, Vasile

Statistics

1840 since deposited on 2021-10-22

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Acq. date: 2026-02-26