Authors

Mao, Shengping; Rottenberg, Xavier; Rochus, Veronique; Nauwelaers, Bart; Tilmans, Harrie

Conference

15th Int. Conf. Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems - EuroSimE

Title

FEM simulation and measurement validation of a cMUT cell

Publication type

Proceedings paper

Embargo date

9999-12-31