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Advanced capabilities and applications of a sputter-RBS system

dc.contributor.authorBrijs, Bert
dc.contributor.authorDeleu, Jeroen
dc.contributor.authorBeyer, Gerald
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-09-30T11:30:50Z
dc.date.available2021-09-30T11:30:50Z
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2420
dc.sourceIIOimport
dc.titleAdvanced capabilities and applications of a sputter-RBS system
dc.typeOral presentation
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.conference15th International Conference on the Application of Accelerators in Research and Industry; 4-7 November 1998; Denton, TX, USA.
dc.source.conferencelocation
imec.availabilityPublished - imec


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