Show simple item record

Fabrication and characterization of CMOS-compatible integrated tungsten heaters for thermo-optic tuning in silicon photonics devices

dc.contributor.authorMasood, A.
dc.contributor.authorPantouvaki, Marianna
dc.contributor.authorGoossens, Danny
dc.contributor.authorLepage, Guy
dc.contributor.authorVerheyen, Peter
dc.contributor.authorVan Campenhout, Joris
dc.contributor.authorAbsil, Philippe
dc.contributor.authorVan Thourhout, Dries
dc.contributor.authorBogaerts, Wim
dc.date.accessioned2021-10-22T03:37:42Z
dc.date.available2021-10-22T03:37:42Z
dc.date.issued2014-07
dc.identifier.issn2159-3930
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24225
dc.sourceIIOimport
dc.titleFabrication and characterization of CMOS-compatible integrated tungsten heaters for thermo-optic tuning in silicon photonics devices
dc.typeJournal article
dc.contributor.imecauthorPantouvaki, Marianna
dc.contributor.imecauthorGoossens, Danny
dc.contributor.imecauthorLepage, Guy
dc.contributor.imecauthorVerheyen, Peter
dc.contributor.imecauthorVan Campenhout, Joris
dc.contributor.imecauthorAbsil, Philippe
dc.contributor.imecauthorVan Thourhout, Dries
dc.contributor.imecauthorBogaerts, Wim
dc.contributor.orcidimecVan Campenhout, Joris::0000-0003-0778-2669
dc.contributor.orcidimecVan Thourhout, Dries::0000-0003-0111-431X
dc.contributor.orcidimecBogaerts, Wim::0000-0003-1112-8950
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage1383
dc.source.endpage1388
dc.source.journalOptical Materials Express
dc.source.issue7
dc.source.volume4
dc.identifier.urlhttp://www.opticsinfobase.org/ome/abstract.cfm?uri=ome-4-7-1383
imec.availabilityPublished - open access


Files in this item

Thumbnail
Name:
30771.pdf
Size:
1.589Mb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record