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Fabrication and characterization of CMOS-compatible integrated tungsten heaters for thermo-optic tuning in silicon photonics devices
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Authors
Masood, A.
;
Pantouvaki, Marianna
;
Goossens, Danny
;
Lepage, Guy
;
Verheyen, Peter
;
Van Campenhout, Joris
;
Absil, Philippe
;
Van Thourhout, Dries
;
Bogaerts, Wim
ISSN
2159-3930
Issue
7
Journal
Optical Materials Express
Volume
4
Title
Fabrication and characterization of CMOS-compatible integrated tungsten heaters for thermo-optic tuning in silicon photonics devices
Publication type
Journal article
Embargo date
9999-12-31
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