Publication:
Fabrication and characterization of CMOS-compatible integrated tungsten heaters for thermo-optic tuning in silicon photonics devices
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2090 since deposited on 2021-10-22
1last month
Acq. date: 2025-12-16
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2090 since deposited on 2021-10-22
1last month
Acq. date: 2025-12-16
Citations