Publication:
Fabrication and characterization of CMOS-compatible integrated tungsten heaters for thermo-optic tuning in silicon photonics devices
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2094 since deposited on 2021-10-22
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Acq. date: 2026-04-05
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Statistics
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2094 since deposited on 2021-10-22
2last month
1last week
Acq. date: 2026-04-05
Citations