Publication:

Fabrication and characterization of CMOS-compatible integrated tungsten heaters for thermo-optic tuning in silicon photonics devices

Date

2014-07
Journal article
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dc.contributor.authorMasood, A.
dc.contributor.authorPantouvaki, Marianna
dc.contributor.authorGoossens, Danny
dc.contributor.authorLepage, Guy
dc.contributor.authorVerheyen, Peter
dc.contributor.authorVan Campenhout, Joris
dc.contributor.authorAbsil, Philippe
dc.contributor.authorVan Thourhout, Dries
dc.contributor.authorBogaerts, Wim
dc.contributor.imecauthorPantouvaki, Marianna
dc.contributor.imecauthorGoossens, Danny
dc.contributor.imecauthorLepage, Guy
dc.contributor.imecauthorVerheyen, Peter
dc.contributor.imecauthorVan Campenhout, Joris
dc.contributor.imecauthorAbsil, Philippe
dc.contributor.imecauthorVan Thourhout, Dries
dc.contributor.imecauthorBogaerts, Wim
dc.contributor.orcidimecVan Campenhout, Joris::0000-0003-0778-2669
dc.contributor.orcidimecVan Thourhout, Dries::0000-0003-0111-431X
dc.contributor.orcidimecBogaerts, Wim::0000-0003-1112-8950
dc.date.accessioned2021-10-22T03:37:42Z
dc.date.available2021-10-22T03:37:42Z
dc.date.embargo9999-12-31
dc.date.issued2014-07
dc.identifier.issn2159-3930
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24225
dc.identifier.urlhttp://www.opticsinfobase.org/ome/abstract.cfm?uri=ome-4-7-1383
dc.source.beginpage1383
dc.source.endpage1388
dc.source.issue7
dc.source.journalOptical Materials Express
dc.source.volume4
dc.title

Fabrication and characterization of CMOS-compatible integrated tungsten heaters for thermo-optic tuning in silicon photonics devices

dc.typeJournal article
dspace.entity.typePublication
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