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High performance a-IGZO thin-film-transistors with mf-PVD SiO2 as an etch-stop-layer

dc.contributor.authorNag, Manoj
dc.contributor.authorSteudel, Soeren
dc.contributor.authorBhoolokam, Ajay
dc.contributor.authorVaisman Chasin, Adrian
dc.contributor.authorRockele, Maarten
dc.contributor.authorMyny, Kris
dc.contributor.authorMaas, Joris
dc.contributor.authorFritz, Thomas
dc.contributor.authorTrube, Jutta
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorHeremans, Paul
dc.date.accessioned2021-10-22T04:10:08Z
dc.date.available2021-10-22T04:10:08Z
dc.date.issued2014
dc.identifier.issn1071-0922
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24304
dc.sourceIIOimport
dc.titleHigh performance a-IGZO thin-film-transistors with mf-PVD SiO2 as an etch-stop-layer
dc.typeJournal article
dc.contributor.imecauthorNag, Manoj
dc.contributor.imecauthorVaisman Chasin, Adrian
dc.contributor.imecauthorMyny, Kris
dc.contributor.imecauthorMaas, Joris
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.imecauthorHeremans, Paul
dc.contributor.orcidimecVaisman Chasin, Adrian::0000-0002-9940-0260
dc.contributor.orcidimecMyny, Kris::0000-0002-5230-495X
dc.contributor.orcidimecHeremans, Paul::0000-0003-2151-1718
dc.source.peerreviewyes
dc.source.beginpage23
dc.source.endpage28
dc.source.journalJournal of the Society for Information Display
dc.source.issue1
dc.source.volume22
dc.identifier.urlhttp://onlinelibrary.wiley.com/doi/10.1002/jsid.212/abstract
imec.availabilityPublished - imec


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