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High performance a-IGZO thin-film-transistors with mf-PVD SiO2 as an etch-stop-layer

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2044 since deposited on 2021-10-22
2last month
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Acq. date: 2026-01-12

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2044 since deposited on 2021-10-22
2last month
1last week
Acq. date: 2026-01-12

Citations