Publication:

High performance a-IGZO thin-film-transistors with mf-PVD SiO2 as an etch-stop-layer

Date

2014
Journal article
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dc.contributor.authorNag, Manoj
dc.contributor.authorSteudel, Soeren
dc.contributor.authorBhoolokam, Ajay
dc.contributor.authorVaisman Chasin, Adrian
dc.contributor.authorRockele, Maarten
dc.contributor.authorMyny, Kris
dc.contributor.authorMaas, Joris
dc.contributor.authorFritz, Thomas
dc.contributor.authorTrube, Jutta
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorHeremans, Paul
dc.contributor.imecauthorNag, Manoj
dc.contributor.imecauthorVaisman Chasin, Adrian
dc.contributor.imecauthorMyny, Kris
dc.contributor.imecauthorMaas, Joris
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.imecauthorHeremans, Paul
dc.contributor.orcidimecVaisman Chasin, Adrian::0000-0002-9940-0260
dc.contributor.orcidimecMyny, Kris::0000-0002-5230-495X
dc.contributor.orcidimecHeremans, Paul::0000-0003-2151-1718
dc.date.accessioned2021-10-22T04:10:08Z
dc.date.available2021-10-22T04:10:08Z
dc.date.issued2014
dc.identifier.issn1071-0922
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24304
dc.identifier.urlhttp://onlinelibrary.wiley.com/doi/10.1002/jsid.212/abstract
dc.source.beginpage23
dc.source.endpage28
dc.source.issue1
dc.source.journalJournal of the Society for Information Display
dc.source.volume22
dc.title

High performance a-IGZO thin-film-transistors with mf-PVD SiO2 as an etch-stop-layer

dc.typeJournal article
dspace.entity.typePublication
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