Publication:

High performance a-IGZO thin-film-transistors with mf-PVD SiO2 as an etch-stop-layer

Date

2014

Journal article

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Author(s)

;

Steudel, Soeren

;

Bhoolokam, Ajay

;

Vaisman Chasin, Adrian

;

Rockele, Maarten

;

;

;

;

;

Groeseneken, Guido

;

Journal

Journal of the Society for Information Display

Statistics

2049 since deposited on 2021-10-22

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Acq. date: 2026-02-24