High performance a-IGZO thin-film-transistors with mf-PVD SiO2 as an etch-stop-layer

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Author(s)

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Steudel, Soeren

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Bhoolokam, Ajay

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Vaisman Chasin, Adrian

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Rockele, Maarten

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Groeseneken, Guido

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Journal

Journal of the Society for Information Display

Metrics

2041 since deposited on 2021-10-22

Acq. date: 2025-10-25