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dc.contributor.authorNaithani, Sanjeev
dc.contributor.authorDuterte, Charles
dc.contributor.authorLevichkova, Marieta
dc.contributor.authorGrisard, Arnaud
dc.contributor.authorSchaubroeck, David
dc.contributor.authorLallier, Eric
dc.contributor.authorHernandez, Yves
dc.contributor.authorWalzer, Karsten
dc.contributor.authorVan Steenberge, Geert
dc.date.accessioned2021-10-22T04:12:14Z
dc.date.available2021-10-22T04:12:14Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24309
dc.sourceIIOimport
dc.titleMid-infrared resonant ablation for selective patterning of thin organic films
dc.typeProceedings paper
dc.contributor.imecauthorSchaubroeck, David
dc.contributor.imecauthorVan Steenberge, Geert
dc.contributor.orcidimecVan Steenberge, Geert::0000-0001-8574-1235
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage91350K-1
dc.source.endpage91350K-12
dc.source.conferenceLaser Sources and Applications II
dc.source.conferencedate14/04/2014
dc.source.conferencelocationBrussels Belgium
dc.identifier.urlhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1867850
imec.availabilityPublished - open access
imec.internalnotesProceedings of SPIE; Vol. 9135


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