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Atomic layer deposition of scandium-based oxides

dc.contributor.authorNyns, Laura
dc.contributor.authorLisoni, Judit
dc.contributor.authorVan den Bosch, Geert
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorVan Houdt, Jan
dc.date.accessioned2021-10-22T04:21:32Z
dc.date.available2021-10-22T04:21:32Z
dc.date.issued2014
dc.identifier.issn1862-6300
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24330
dc.sourceIIOimport
dc.titleAtomic layer deposition of scandium-based oxides
dc.typeJournal article
dc.contributor.imecauthorNyns, Laura
dc.contributor.imecauthorVan den Bosch, Geert
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorVan Houdt, Jan
dc.contributor.orcidimecNyns, Laura::0000-0001-8220-870X
dc.contributor.orcidimecVan den Bosch, Geert::0000-0001-9971-6954
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.contributor.orcidimecVan Houdt, Jan::0000-0003-1381-6925
dc.source.peerreviewyes
dc.source.beginpage409
dc.source.endpage415
dc.source.journalPhysica Status Solidi A
dc.source.issue2
dc.source.volume211
dc.identifier.urlhttp://onlinelibrary.wiley.com/doi/10.1002/pssa.201330080/abstract
imec.availabilityPublished - imec


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