Atomic layer deposition of scandium-based oxides

Metadata

Show full item record

Authors

Nyns, Laura; Lisoni, Judit; Van den Bosch, Geert; Van Elshocht, Sven; Van Houdt, Jan

ISSN

1862-6300

Issue

2

Journal

Physica Status Solidi A

Volume

211

Title

Atomic layer deposition of scandium-based oxides

Publication type

Journal article

Collections

Articles