Publication:

Atomic layer deposition of scandium-based oxides

Date

2014

Journal article

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Author(s)

;

;

Van den Bosch, Geert

;

Van Elshocht, Sven

;

Journal

Physica Status Solidi A

Metrics

1936 since deposited on 2021-10-22

3last month

Acq. date: 2025-12-10