dc.contributor.author | Oba, Yoshiyuki | |
dc.contributor.author | De Messemaeker, Joke | |
dc.contributor.author | Tyrovouzi, Anna Maria | |
dc.contributor.author | Miyamori, Yuichi | |
dc.contributor.author | De Vos, Joeri | |
dc.contributor.author | Wang, Teng | |
dc.contributor.author | Beyer, Gerald | |
dc.contributor.author | Beyne, Eric | |
dc.contributor.author | De Wolf, Ingrid | |
dc.contributor.author | Croes, Kristof | |
dc.date.accessioned | 2021-10-22T04:22:23Z | |
dc.date.available | 2021-10-22T04:22:23Z | |
dc.date.issued | 2014 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/24332 | |
dc.source | IIOimport | |
dc.title | Effect of test structure on electromigration characteristics in 3D-TSV stacked devices | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | De Messemaeker, Joke | |
dc.contributor.imecauthor | De Vos, Joeri | |
dc.contributor.imecauthor | Beyer, Gerald | |
dc.contributor.imecauthor | Beyne, Eric | |
dc.contributor.imecauthor | De Wolf, Ingrid | |
dc.contributor.imecauthor | Croes, Kristof | |
dc.contributor.orcidimec | De Vos, Joeri::0000-0002-9332-9336 | |
dc.contributor.orcidimec | Beyne, Eric::0000-0002-3096-050X | |
dc.contributor.orcidimec | De Wolf, Ingrid::0000-0003-3822-5953 | |
dc.contributor.orcidimec | Croes, Kristof::0000-0002-3955-0638 | |
dc.source.peerreview | yes | |
dc.source.conference | Advanced Metallization Conference - ADMETA: 24th Asian Session | |
dc.source.conferencedate | 22/10/2014 | |
dc.source.conferencelocation | Tokyo Japan | |
imec.availability | Published - imec | |