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CMP process steps for silicon-based photonics integration

dc.contributor.authorOng, Patrick
dc.contributor.authorVerheyen, Peter
dc.contributor.authorLepage, Guy
dc.contributor.authorVan Campenhout, Joris
dc.contributor.authorAbsil, Philippe
dc.date.accessioned2021-10-22T04:27:47Z
dc.date.available2021-10-22T04:27:47Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24346
dc.sourceIIOimport
dc.titleCMP process steps for silicon-based photonics integration
dc.typeOral presentation
dc.contributor.imecauthorOng, Patrick
dc.contributor.imecauthorVerheyen, Peter
dc.contributor.imecauthorLepage, Guy
dc.contributor.imecauthorVan Campenhout, Joris
dc.contributor.imecauthorAbsil, Philippe
dc.contributor.orcidimecOng, Patrick::0000-0002-2072-292X
dc.contributor.orcidimecVan Campenhout, Joris::0000-0003-0778-2669
dc.source.peerreviewno
dc.source.conferenceInternational CMP Symposium organized by CAMP, Clarkson University
dc.source.conferencedate10/08/2014
dc.source.conferencelocationAlbany, NY USA
imec.availabilityPublished - imec


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