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Low temperature chemical vapour synthesis of Cu3Ge thin films for interconnect applications

dc.contributor.authorPeter, Antony
dc.contributor.authorCarbonell, Laure
dc.contributor.authorSchaekers, Marc
dc.contributor.authorOpsomer, Karl
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorRichard, Olivier
dc.contributor.authorBender, Hugo
dc.contributor.authorFranquet, Alexis
dc.contributor.authorMeersschaut, Johan
dc.contributor.authorWen, Liang Gong
dc.contributor.authorTokei, Zsolt
dc.contributor.authorVan Elshocht, Sven
dc.date.accessioned2021-10-22T04:41:20Z
dc.date.available2021-10-22T04:41:20Z
dc.date.issued2014
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24377
dc.sourceIIOimport
dc.titleLow temperature chemical vapour synthesis of Cu3Ge thin films for interconnect applications
dc.typeJournal article
dc.contributor.imecauthorPeter, Antony
dc.contributor.imecauthorSchaekers, Marc
dc.contributor.imecauthorOpsomer, Karl
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.orcidimecSchaekers, Marc::0000-0002-1496-7816
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage246
dc.source.endpage250
dc.source.journalMicroelectronic Engineering
dc.source.volume120
dc.identifier.urlhttp://www.sciencedirect.com/science/article/pii/S0167931713005777
imec.availabilityPublished - open access


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